Burn-Wet Scrubber

The Burn-Wet Scrubber is designed for treating waste gas with fluorine content. Combining high-temperature combustive decomposition and hydro dissolution, the process waste gas reacts into a powder or dissolves in the water by way of two-stage high-temperature combustion in the reaction chamber; it is then discharged into the disposal facilities of the plan via another water trough. The system is capable of handling special gases used by most semiconductor and TFT-LCD manufacturers. The maintenance frequency is low and the maintenance time is short, minimizing the impact to the production schedule.

Product Features：
1.Working temperature up to 1350℃ for effective treatment of PFC and Gas.
2.Remote-monitor System for non-interrupted control of machine status.
3.The machine uses circulating water mostly, water consumption is fairly low.
4.Double pressure gauge for monitoring inlet pressure and outlet pressure.
5.Touch-control LCD Display with both Chinese and English interfaces for humanized operation.
6.Double chamber design with independent control systems for automatic by pass.
7.The reaction chamber with a special design for clog prevention as well as for PFA anti-corrosion, enables prolonged PM (Periodical Maintenance) cycle and shortened PM duration.
8.The PLC Control System with man-machine interface circuitry offers 99.9% stability and accuracy as well as simple and prompt maintenance.
9.Featuring SEMI Certification and safety mechanisms such as interlock, instant alarm, troubleshooting, etc.

Product Specifications：
1. 2-8 waste gas inlets can be arranged in accordance with the process.
2. Dimensions (mm) ：2100 H x 1200W x 1500 D
3. Machine Weight：635kg
4. Max. handling capacity up to 1200 SLM

options：
Exhaust Blower、Extension LCD Monitor Controller、Auto By Pass System 、Preheat Gun、Heating Jacket、PH Meter System